High quality custom designed chips, send your request to request@SPRchips.com

Substrates: We make sure that you get exactly the substrate that you want. In stock: Si, Fused silica, Borofloat, NBK7, D263T

Layers: Most materials are available (Au, Ag, Al, Al2O3, C, Cr, Cu, Fe, Ge, Hf, Mg, Nb, Ni, NiCr, Pr, Pt, Si, SiO2, Si3N4, Ta, Ti, TiN, TiO2).

Evaporation or sputtering is normally used to apply the films.

Patterns: Photolithography or EBL are used to transfer patterns. Minimum feature size 30nm

SPR (surface plasmon resonance):

We provide a standard chip for SPR analysis (minimum order 10 sensor chips):

Glass substrate (NBK7)

LxW = 11.8 x 9.8 mm

Refraction index (nd) = 1.51680

For advanced lithography visit www.litcon.net or send your request to info@litcon.net

An example of a 3D pattern generated by EBL and transferred into fused silica

(fabricated by Litcon AB).